Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
<Local manufacturing of APC value in korea>
Production process of Wafer by semiconductor deposition equipment is a process that needs precise and fast control of required vacuum pressure of vacuum chamber.
And APC valve do important role at this process.
There weren't APC valve producted in Korea, so korean companies used APC Valve was manufactured by japanese corperation
Develoment of APC valve Domestic manufacturing is started at 2019, and it success.
The APC valve passed performance test by Samsung electronics, SK hynix, and Wonik IPS
<Advatage of APC valve producted in korea>
● Cost reduction (more than 20%)
- Purchase cost of APC VALVE for spares can be reduced
- Previous maker's APC valve repair cost go down
(This APC valve is compatible with Previous APC valve)
- Purchase cost of APC VALVE for spares can be reduced
- Previous maker's APC valve repair cost go down
(This APC valve is compatible with Previous APC valve)
● Improvement of APC valve's structure
- Change to contactless position sensor from contact type position sensor
- If C** Co.'s board fail, this APC valve can be applied.
- Anti-corrosion coating is applied to Valve body
(SCACF coating, Re-coating is available.)
(SCACF coating, Re-coating is available.)
<Comparison with APC Valve of C** Co.>
1. Position Control
2. Slow Vacuum Control
3. Pressure Control-P1 pressure change control
4. Pressure Control-P1 pressure change cotrol - Cycle test
<APC Valve heating jacket comparison>
pfk instruments, equipments
Comments
Post a Comment