Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
<Gard eye> - Machine Inside Monitoring System Developed and manufactured by PFK - <History of Development> Engineers wished to improve the CCTV camera inside diffusion tool as wafers occasionally broke However it was challenging due to extemely high temperature around loading area After long experiments, PFK finally developed the camera which can withstand the high temperature 8 HD Cameras with 1 controller system with software 16 Cameras and 16 Led light with 1 controller system with software Gard eye Monitors wafer loading area and stores in a file it can withstands high temperature environment Prevents from accidents can occur at diffusion tool wafer loading area Gard eye Monitor and store data in a file for 30 days pfk semiconductor, instruments, equipments