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The-MAP with UEI DAQ

Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system)   DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot,  Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally.   Main interface of The-MAP
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Gas filter - Filtration Technology

<Application of PFK Gas Filter> - Without Diffuser - Gas flow cause particles on the bottom of chamber  move up and sit dowm on the wafer. - With Diffuser - Gas going into chamver spread smoothly No gas flow pattern Gas can be diffused inside chamber <Flow rate is growing in propotion to pressure> <Actual photograph of Gas Filter> - Gas filter Enlarged Photograph  - (X 3500) - Photo taken under water - (Checking uniformity) PFK can supply both Stainless and Quartz material filters In any shape or desi g n that customer required.  pfk instruments equipments
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Gas filter

   < Gas Filter Solution> Gas filers - Quartz and Stainless steel When Gas is put into chamber, By spreading gas flow pattern,  it reduce risk that particle inside chamber  sit on the surface of wafer because of gas flow by dispersing pattern of gas flow -Gas break filter- This Gas break filter's material is  SS316 stainless -Gas break Filter (SBI) - Material  SS316 Stainless filter  for TEL furnace - Gas Break Filter  - (Material : Quartz)  This type of Gas filter is appropriate to toxic or acid gas  which damage stainless pfk instruments, equipments
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