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The-MAP with UEI DAQ

Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system)   DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot,  Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally.   Main interface of The-MAP

TC Wafer - K type 12inch 57points.

  Type : K Type Size : 12 inch Point : 57 points pfk semiconductor, instruments, equipments

TC Wafer

TC Wafer  TC wafer can be made  up for 48 TC points Minimum distance  from wafer's edge to TC Point is  2mm Wafer 2", 4", 5", 6" 8", 12" Type K type(Accuracy:0.4% of reading)  R type(0.25% of reading)  S type(0.25% of reading) TC wire Diameter 0.127mm 0.07mm (For RTP process 0.07mm is recommendable) Connector Di sub Connector Miniconnector etc.. Max temperature  : 1,10 0 ℃  Insulation material : silica sleeve(max temp:850℃),  micro quartz tube(max temp: 1,100℃), Teflon (max temp: 250℃),  ceramic sleeve, etc.. Lead time 2 weeks Vacuum Feed through Kapton tape will insulate and  protect TC wire and Vacuum rate  10 to-7 torrcan be available. < Structure of TC Wafer > ● Wafer - SI WAFER, SIO2 filmed Wafer, Cu filmed Wafer, TiTiN filmed Wafer -GaAs wafer Sapphire wafer, Quartz wafer Glass wafer, etc ● Insulator -Ceramic fiber (250~ 850C), Quartz(850~1200C) -Teflon / Polymide(0~250C), Fiber glass(0~450) ● Connector -Mini connector (Exellent accurancy),