Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
① C type high temperature sensor -Max operating temperature up to 2000℃ ② K type temperature sensor with quartz protection tube ③ K type body temperature sensor - K type thermocouple sensor - For Dry etch system - K type thermocouple sensor - For CVD system <High Temp sensor> - Structure of High temp sensor - - Specification of High temperature sensors - pfk semiconductor, instruments, equipments