Skip to main content

The-MAP with UEI DAQ

Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system)   DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot,  Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally.   Main interface of The-MAP
Post a Comment

Temperature Sensor - Types

① C type high temperature sensor
-Max operating temperature up to 2000℃

② K type temperature sensor with quartz protection tube

③ K type body temperature sensor

- K type thermocouple sensor -
For Dry etch system

- K type thermocouple sensor -
For CVD system

<High Temp sensor>
- Structure of High temp sensor -


- Specification of High temperature sensors -




pfk semiconductor, instruments, equipments
 

Labels:

Comments

Post a Comment