Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
① C type high temperature sensor
-Max operating temperature up to 2000℃
② K type temperature sensor with quartz protection tube
③ K type body temperature sensor
- K type thermocouple sensor -
For Dry etch system
- K type thermocouple sensor -
For CVD system
<High Temp sensor>
- Structure of High temp sensor -
- Specification of High temperature sensors -
pfk semiconductor, instruments, equipments
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