Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
<Application of PFK Gas Filter>
- Without Diffuser -
Gas flow cause particles on the bottom of chamber
move up and sit dowm on the wafer.
- With Diffuser -
Gas going into chamver spread smoothly
No gas flow pattern Gas can be diffused inside chamber
<Flow rate is growing in propotion to pressure>
<Actual photograph of Gas Filter>
(X 3500)
(Checking uniformity)
PFK can supply both Stainless and Quartz material filters
In any shape or design that customer required.
pfk instruments equipments
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