Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
<Gard eye>
- Machine Inside Monitoring System
Developed and manufactured by PFK -
<History of Development>
Engineers wished to improve the CCTV camera
inside diffusion tool as wafers occasionally broke
However it was challenging due to extemely
high temperature around loading area
After long experiments,
PFK finally developed the camera
which can withstand the high temperature
8 HD Cameras with 1 controller system with software
16 Cameras and 16 Led light with
1 controller system with software
Gard eye Monitors wafer loading area and stores in a file
it can withstands high temperature environment
Prevents from accidents can occur at
diffusion tool wafer loading area
Gard eye Monitor and store data in a file for 30 days
pfk semiconductor, instruments, equipments
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