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The-MAP with UEI DAQ

Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system)   DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot,  Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally.   Main interface of The-MAP
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APC Valve - Structive

 


<structure of APC Valve>




 <Overall structure of APC Valve>


- Specification of Chamber -

    • Chamber ID : 310.5mm
    • Internal height of chamber : 990mm
    • Volume of Chamber : 75L  


<Application of APC valve>


pfk semiconductor, instruments

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