Simmulation of The-MAP with UEI DAQ (The-MAP : PFK's self-developmented TC-wafer temperature monitoring system) DAQ by UEI(United Electronic Industry) UEI DAQ has 3 slot, Each slot can connected with 12channel module, UEI DAQ can handle 36 channels totally. Main interface of The-MAP
MOST
-Measurement instrument Of Surface Temperature-
MOST = TC Wafer + The-Map software+ data logger
Use softwar developed by PFK
with data logger from National Instrument
will show reliable and accurate temperature data.
MOST 1 : TC wafer Data logger + data analysis software total solution
The-MAP
-Thermal Image map-
THE-MAP is TC wafer temperature data logger system
developed and manufactured by PFK Co.
By Its specialized patented technology
You can easily monitor and take data of
temperature uniformity of wafer inside of chamber.
By using thermocouple wafer and possible to findreal time data of temperature on the wafer
MOST 2 : Wireless data logging system
pfk semiconductor, instruments
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